Process Films

process film measurement

Filmetrics offers a full range of products for measuring thickness and index of any non-metallic semiconductor process film.

The F20 is the most affordable solution for single-spot measurements of thickness and index.

For small-spot-size thickness measurements (down to 1 micron or less), the F40 will attach to your microscope.

For affordable, automated point-by-point thickness mapping of blanket films, try the F50.

Our patented Thickness Imaging technology results in easier set up, fewer recipes, more robust pattern recognition, and much lower cost than conventional thin-film metrology tools. Both stand alone and integrated versions are available.

Contact our thin-film experts to discuss your process film application.

Filmetrics offers free trial measurements- results are typically available in 1-2 days

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We love talking about thin films, so we’ll reply in just a minute or two (M-F).

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  • Amorphous & Polysilicon

    Measure thickness, crystallinity, and n and k of all forms of amorphous and polycrystalline silicon.

  • CMP

    Our F80 Thickness Imaging products are used to measure oxide, STI, and metal CMP processes.

  • Dielectrics

    Filmetrics stocks instruments that measure the thousands of dielectric films used throughout industry.

    CVD, dielectrics, barrier, PECVD, passivation, insulator, protection, Al2O3, CoO, ZnO, MoO, TiO2, Cr2O3, Nb2O5

  • Hardcoat Thickness

    Filmetrics systems are used widely in the automotive industry to verify hardcoat and primer thickness.

    Acrylic, Automotive industry, Chemical resistance, Clear coating, Decorative coating, Hardcoat, Eyewear, Face shield, Hardcoat, Hardness, Interpenetration Layer, Marring, Ophthalmic lens, Optical quality, Plastic lens, Polycarbonate, Polyester, Siloxane, Primer, Protective film, Scratch resistant, Screen protection, Surface finish, Surface protection, Thermal cure, Top coating, Touch screen, UV coating, UV cure

  • IC Failure Analysis

    The F3-sX is used throughout the chip making industry to measure backside thinning of silicon.

    Failure Analysis, FA, Silicon, Si, Integrated circuit, IC, Polishing, Backside failure analysis, Silicon thinning

  • ITO & Other TCOs

    Proprietary analysis algorithms allow one-click measurement of TCO thickness, index, and k.

    Indium tin oxide, ITO, tin-doped indium oxide, Transparent conductive oxide, TCO, Display, Front contact, Transparent Electrode, LED, LCD, Solar, Fluorine-doped tin oxide, FTO, TEC, TEC glass, Aluminum zinc oxide, AZO, Aluminum-doped zinc oxide, Zinc oxide, iZO, Indium zinc oxide, IZO, zinc-doped indium oxide

  • Medical Devices

    Measure thickness of angioplasty balloons, stent and implant coatings, and many others.

    Stents, drug-coated stents, Drug-coating, Balloons, Angioplasty, Parylene, Microfluidic device, Air gap, Catheter, Membranes

  • Metal Thickness

    Measure thickness, index, and k of metal films up to 50nm thick.

    Metallized, Metallization, Foils, Stents, Mirrors, Steel, Stainless Steel, Gold, Nickel, Aluminium, Silver, Cobalt, Zinc, Molybdenum, Titanium, Chrome, Chromium, Niobium, Tungsten, Gallium, Germanium

  • OLEDs

    Measure thickness and index of NPB, AlQ3, PEDOT, P3HT, soluble Teflons, etc…

    PLED, AMOLED, Hole Transport (HT), Hole Injection Layer (HIL), Host Materials, anode, cathode, Alq3, NPB, phenylene vinylene, carbazole, thiophene, aniline, styrenesulfonate, phthalocyanine, naphthalene, fluorene, lithium, silver, ITO, calcium

  • Ophthalmic Coatings

    Use the F10-AR to measure reflectance and color, as well as AR and hardcoat layer thicknesses.

    eyeglasses, HC, hardcoat, scratch resistant, AR, anti-reflection, reflectance, UV curable, hydrophillic, polycarbonate, high index, CR39, MR-6, MR-7, Trivex

  • Parylene Coatings

    Simply set your parylene-coated sample on the stage of the F3-CS to measure its thickness!

    Conformal

  • Photoresist

    We’ve measured dozens of different resists, and can generate index files for any resist you use.

    SU-8, resist, Photoresist, PR, AZ, AZP, ZEP, positive, negative, g-line, i-line, KrF, PMMA, FEP, GRX, KMPR

  • Porous Silicon

    Measure thickness, porosity, refractive index, and k of your porous silicon films.

  • Process Films

    Filmetrics offers a full range of products for measuring semiconductor process films.

  • Refractive Index & k

    Measure refractive index and extinction coefficient over wavelengths as wide as 190-1700nm.

    n & k, complex, real , imaginary, refractive index, absorption, extinction coefficient, indices, Kramers-Kronig, optical dispersion, dielectric, Lorentz, Cauchy, photoresist, anomalous dispersion, path length

  • Silicon Wafers & Membranes

    We offer tabletop, mapping, and production systems for measuring silicon up to 2mm thick.

  • Solar Applications

    Measure CdTe, CdS, CIGS, amorphous-Si, TCOs, anti-reflection (AR) layers, and more...

    Copper indium gallium diselenide, CIGS, Cadmium telluride, CdTe, Cad tel,, Amorphous silicon, Amorphous Si, a-Si, Cadmium sulfide, CdS, window layer, buffer layer, Thin-film photovoltaic, Thin-film PV, TFPV, photovoltaics, Solar, Solar cells, Inline, In-situ, Roll-to-roll, R2R, Evaporation, Sputtering, CVD, MOCVD, PECVD, Transparent conductive oxide, TCO, Indium tin oxide, ITO, tin-doped indium oxide

  • Semiconductor Teaching Labs

    More than fifty Filmetrics F20s have been delivered for use in university teaching labs.

  • Web Coatings

    Filmetrics systems are widely used in the polymer-films community to measure thickness in-line.

    Roll to roll, Roll measurements, Roll systems, Rolling substrate, Roll fed, Roll web, Reel to reel , R2R, Web coater, Autoweb, In-line, In-line monitor, Online thickness, Line monitoring system, Precision measuring tools, Automatic, Feeding, Production, Multipoint, High speed