Thickness Standards

Filmetrics stocks a wide selection of thin-film thickness standards. If you don’t see what you need below please contact us. We can also make film thickness standards from samples that you supply. All thickness standards can be supplied as NIST-traceable.

For more information on Filmetrics accessories, please contact our U.S. offices by calling +1 858-573-9300 (24 Hr, M-F) or contact us by e-mail.

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  TS-Custom-NIST

  Creates custom NIST-traceable thickness calibration on a customer-supplied sample. Click here to request our NIST-Traceable Standards Appnote.

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  TS-Focus-SiO2-4-3100

  SiO2-on-Si thickness standard with focus area, approx 3100Å thick, 4 inch wafer.

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  TS-Focus-SiO2-4-10000

  SiO2-on-Si thickness standard with focus area, approx 10000Å thick, 4 inch wafer.

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  TS-Hardcoat-4µm

  Hardcoat-on-acrylic thickness standard, approx 4µm thick, 2 inch diameter.

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  TS-Hardcoat-Trans

  Hardcoat with transparent backside for transmittance measurements.

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  TS-Parylene-4µm

  Parylene-on-acrylic thickness standard, approx 4µm thick, 2 inch diameter.

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  TS-Parylene-8µm

  Parylene-on-silicon thickness standard, approx 8µm thick, 23mm x 23mm

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  TS-SiO2-4-7200

  SiO2-on-Si thickness standard, approx 7200Å thick, 4 inch wafer.

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  TS-SiO2-4-7200-NIST

  NIST-traceable TS-SiO2-4-7200.

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  TS-SiO2-6-Multi

  SiO2-on-Si multiple thickness standard: 125Å, 250Å, 500Å, 1000Å, 5000Å, and 10000Å (actual thicknesses +/-10% nominal values, accurate to within 2Å), on 6 inch wafer.

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  TS-SS3-SiO2-8000

  SiO2-on-Si thickness standard, approx 8000Å thick, for SS-3 stage.

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