F50 Series

Automated Film Thickness Mapping

The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 450mm in diameter. (This is the same high-lifetime stage that performs millions of measurements in our production systems!)

Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.

The F50 film thickness mapping system connects to the USB port of your Windows® computer and can be set up in minutes.

The different F50 instruments are distinguished primarily by thickness and wavelength range. The standard F50 is the most popular. Generally shorter wavelengths (e.g. F50-UV) are required for measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.

Model Specifications

*Film stack dependent
Model Thickness Range* Wavelength Range
F50 20nm-70µm 380-1050nm
F50-UV 5nm-40µm 190-1100nm
F50-NIR 100nm-250µm 950-1700nm
F50-EXR 20nm-250µm 380-1700nm
F50-UVX 5nm-250µm 190-1700nm
F50-XT 0.2µm-450µm 1440-1690nm
F50-s980 4µm-1mm 960-1000nm
F50-s1310 7µm-2mm 1280-1340nm
F50-s1550 10µm-3mm 1520-1580nm
Thickness Range*

Additional Perks

  • Library with over 130 materials included with every system, along with access to 100s more
  • Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
  • Online "Hands On" support (internet connection required)
  • Hardware upgrade program

Common Optional Accessories